Surface plastic flow in polishing of rough surfaces

Deposition of Various Shapes Particles on a Rough Surface in Turbulent Flow

An experiment set-up is used to study wall deposition rate of particles on a rough surface in a turbulent channel flow. Deposition velocities for three classes of particles, namely, spherical glass particles, irregular shape polymer particles, and fibrous silicon particles are studied. The particle concentration at the test section was measured with the aid of an isokinetic probe in conjunction...

A Static Friction Model for Elastic-Plastic Contacting Rough Surfaces

A model that predicts the static friction for elastic-plastic contact of rough surfaces is presented. The model incorporates the results of accurate finite element analyses for the elastic-plastic contact, adhesion and sliding inception of a single asperity in a statistical representation of surface roughness. The model shows strong effect of the external force and nominal contact area on the s...

Elastic-plastic Contact of a Rough Surface with Weierstrass Profile

In this appendix, we list the expressions that characterize the response of an elastic-perfectly plastic solid with sinusoidal roughness to indentation by a rigid flat punch. The substrate is an elastic-perfectly plastic solid with Young’s modulus E, Poisson’s ratio ν and yield stress Y σ . The surface roughness has wavelength n λ and amplitude n g . In terms of these parameters, we define a ma...

Fusion bonding of rough surfaces with polishing technique for silicon micromachining

Surface roughness is one of the crucial factors in silicon fusion bonding. Due to the enhanced surface roughness, it is almost impossible to bond wafers after KOH etching. This also applies when wafers are heavily doped, have a thick LPCVD silicon nitride layer on top or have a LPCVD polysilicon layer of poor quality. It has been demonstrated that these wafers bond spontaneously after a very br...

Frequency-dependent viscous flow in channels with fractal rough surfaces